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This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of microscale actuator cells allows the addition of force and displacements of a large number of cells (up to 7600 in one demonstrated array), leading to displacements ranging in the hundreds of microns and several gram forces of axial force. For 50 µm thick actuators with horizontal dimensions in the 1–4 millimeter range, an out-of-plane displacement of up to 678 µm at 46 V, a bending moment of up to 2.0 µNm, i.e., 0.08 N (~8 gram-force) of axial force over a 50 µm by 2 mm cross-sectional area of the actuator (800 kPa of electrostatically generated stress), and an energy density (mechanical work output per stroke per volume) up to 1.42 mJ/cm³was demonstrated for the actuators.

We report here a compact vapor sensor based on polymer coated two-dimensional (2D) defect-free photonic crystal slabs (PCS). The sensing mechanism is based on the resonance spectral shift associated with the Fano resonance mode in the PCS due to the vapor molecule adsorption and desorption induced changes in both polymer thickness and polymer refractive index (RI). Sensitivity due to RI and thickness change were theoretically investigated respectively. With three different thicknesses of OV-101 polymer coating, sensitivity and response time were experimentally evaluated for hexane and ethanol vapors. The polymer demonstrated roughly four times higher sensitivity towards the hexane vapor than ethanol vapor. The PCS sensor with thicker polymer coating showed higher sensitivity to both hexane and ethanol vapors but exhibiting longer response time.